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Correlative Mikroscopy: Combination of Optical and SEM Data



Optical microscope: JOMESA HFD

  • Fast scan of filter/particle trap

  • Evaluates particle sizes and positions

  • Sorts into metallic, nonmetallic and fibers

  • User can mark particles for fast SEM-EDX analysis

  • Stores results into database

SEM with EDX: JOMESA PSE

  • Reads particle informations from database

  • Fast SEM-EDX analysis of selected particles

  • Optional: Full scan or all optical particle scan

  • Stores results to database



JOMESA PSE screen: shows optical and SEM image





Choosing area for EDX analysis